This analytical method is a validated measurement procedure for the determination of arsenic [7440-38-2], beryllium [7440-41-7], cadmium [7440-43-9], cobalt [7440-48-4], nickel [7440-02-0] and their particulate compounds after personal or stationary sampling. Sampling is performed by drawing a defined volume of air through a nitrocellulose membrane filter using a suitable flow-regulated pump. After acid digestion, the elements retained on the filter are analysed using inductively coupled plasma mass spectrometry. The relative limits of quantification are between 0.00029 μg/m³ for beryllium and 0.11 μg/m³ for nickel for an air sample volume of 1.2 m³. The mean recovery was between 97% for arsenic and 111% for beryllium. The concentration-dependent expanded uncertainty was 21% to 28%. This analytical method has been accredited by the accident insurance companies for the detection in workplace air of substances that are carcinogenic, mutagenic or toxic to reproduction. This method has been tested and recommended for the determination of arsenic in work areas by the German Social Accident Insurance (DGUV). Both personal and stationary sampling can be performed for measurements in order to evaluate work areas.